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MAM 2010
will be held in
Mechelen ( Malines) - BELGIUM
from 7 to 11 March
NEW !
MAM2009 Gallery of photos (see here)

WELCOME AT THE 2009 MATERIALS FOR ADVANCED METALLIZATION CONFERENCE HOME PAGE

This workshop is the 18th in a series devoted to materials research, materials properties and interactions.

Starting with refractory metals and silicides in the 80's, moving to materials for advanced metallization in 1995, this year's workshop addresses new and challenging topics in the field of BEOL solutions, novelties in alternative interconnect systems and more widely advanced materials and structures relevant to micro and nano-electronics.

The objective of the workshop is to provide a forum for open discussions between science and industrial application. It is dedicated to material scientists, process and integration engineers and Ph-D students.

Topics include both fundamental and applied research, as well as issues related to introduction into manufacturing. With the progressive downscaling of device dimensions and the simultaneous demand for more functionality, the challenges have become tremendous. New and extensive materials research is needed to further follow IC scaling as well as to develop new devices at the nanoscale.

Invited talks will be given by scientific and technical leaders in each of the key areas to present the current state-of-the-art and to stimulate technical discussions.

THE SUBMITTED PAPERS SHOULD ADDRESS
materials and processes, advanced characterization and modelling activities that covers nanoscale applications such as :

    • Metal process
    • Silicides
    • Dielectrics
    • 3D integration, passive devices, packaging
    • Contact / metal gate
    • Cu interconnect integration
    • Materials properties at nanoscale
    • Nanostructures
    • Materials for memories
    • Simulation & modeling